Flexibel und druckempfindlich : Sensoren für die Insertionsüberwachung in der Cochlea

Das Einsetzen eines Cochlea-Implantats in die Hörschnecke ist eine komplizierte Operation, die nicht immer ohne Schädigung des empfindlichen Gewebes einhergeht. Forschungsarbeiten am Institut für Mikroproduktionstechnik (IMPT) konzentrieren sich deswegen auf die Entwicklung einer Sensorik im Implantat, die dem Chirurgen während des Eingriffs helfen soll, Verletzungen zu vermeiden

Degeneration Effects of Thin-Film Sensors after Critical Load Conditions of Machine Components

In the context of intelligent components in industrial applications in the automotive, energy or construction sector, sensor monitoring is crucial for security issues and to avoid long and costly downtimes. This article discusses component-inherent thin-film sensors for this purpose, which, in contrast to conventional sensor technology, can be applied inseparably onto the component’s surface via sputtering, so that a maximum of information about the component’s condition can be generated, especially regarding deformation. This article examines whether the sensors can continue to generate reliable measurement data even after critical component loads have been applied. This extends their field of use concerning plastic deformation behavior. Therefore, any change in sensor properties is necessary for ongoing elastic strain measurements. These novel fundamentals are established for thin-film constantan strain gauges and platinum temperature sensors on steel substrates. In general, a k-factor decrease and an increase in the temperature coefficient of resistance with increasing plastic deformation could be observed until a sensor failure above 0.5% plastic deformation (constantan) occurred (1.3% for platinum). Knowing these values makes it possible to continue measuring elastic strains after critical load conditions on a machine component in terms of plastic deformation. Additionally, a method of sensor-data fusion for the clear determination of plastic deformation and temperature change is presented

Detailed characterisation of batch-manufactured flexible micro-grinding tools for electrochemical assisted grinding of copper surfaces

Precision machining is becoming more and more important with the increasing demands on surface quality for various components. This applies, for example, to mirror components in micro-optics or cooling components in microelectronics. Copper is a frequently used material for this purpose, but its mechanical properties make it difficult to machine. In this study, a process strategy for finishing copper surfaces with batch-manufactured micro-grinding tools in an electrochemically assisted grinding process is demonstrated. The tool heads are manufactured from a polyimide-abrasive-suspension and silicon as a carrier substrate using microsystems technology. The matching shafts are milled from aluminium. The tools are then used on pure copper and oxidised copper surfaces. By using finer abrasives grains (1.6–2.4 µm instead of 4–6 µm) than previously, similar surface roughness values could be achieved (Ra = 0.09 ± 0.02 µm, Rz = 1.94 ± 0.73 µm) with the same grinding process. An optimised grinding process that combines the use of rough and fine tools, on the other hand, achieves significantly better surface finishes in just four grinding iterations (Ra = 0.02 ± 0.01 µm, Rz = 0.83 ± 0.21 µm). In order to achieve a further increase in surface quality, this optimised grinding process is combined with the anodic oxidation of the copper workpieces. The surface modification is done to increase the machinability of the surface by creating an oxide layer. This is confirmed by the results of scratch tests carried out, which showed less force acting on the tool during machining with the oxide layer than with a pure copper surface. To realise this within the machine tool, an electrochemical cell is shown that can be integrated into the machine so that the oxidation can be carried out immediately before the grinding process. The copper layers produced inside the electrochemical cell in the machine tool show similar characteristics to the samples produced outside. Processing the oxidised samples with the optimised grinding process led to a further reduction of about 17% in the Rz values (Ra = 0.03 ± 0.01 µm, Rz = 0.69 ± 0.20 µm). The combination of the shown grinding process and the integration of anodic oxidation within the machine tool for the surface modification of copper workpieces seems to be promising to achieve high surface finishes

Nonevaporable getter-MEMS for generating UHV conditions in small volumina

The industrial use of quantum sensors requires further miniaturization of the experimental peripherals, i.e., the high vacuum chamber, laser technology, and control electronics. A central part of the high vacuum chamber is the maintenance of vacuum conditions. For this purpose, a prototype of a compact, i.e., miniaturized, ultrahigh vacuum pump in the form of a nonevaporable getter (NEG) pump at a wafer level (MEMS), is developed within the scope of this work. With regard to the basic conditions of the functionality of the NEG, a miniaturized heating plate with temperature sensors is analytically and numerically developed, constructed, and characterized in an ultrahigh vacuum test stand. This is followed by the integration of the NEG into the existing system, which, in connection with the characterization of material-specific parameters, enables a first correlation of heat input and pumping power. Thus, performance data of the getter-MEMS under high-vacuum confinement confirm its usability for quantum sensors. In addition, optimization potentials are shown with regard to all partial aspects of the MEMS

Grinding of riblets with "beaver tooth" multi-layer tools

To reduce friction in turbo machinery components, riblets are induced on compressor blades or pump impellers. Here, the grinding process enables a higher productivity in machining of riblet structures compared to knurling, laser or milling operations. Usually, profiled grinding tools are used to create such structures inspired by sharkskin. Unfortunately, conventional grinding tools have to be dressed continuously to keep the desired profile in the circumferential surface. To avoid the time-consuming dressing process and to enable a self-sharpening effect, an innovative multi-layer tool concept is developed. The tool consists of two types of thin polyimide layers. The first type contains abrasives and the second is a support layer without abrasives. These layers are piled alternately in a special manufacturing process and act like a monolithic tool in grinding process. The aim of the investigations presented in this paper is to find an optimal parameter setting to produce riblet structures productively by using the self-sharpening effect. The optimal setting allows a grinding process without any dressing process by using a large part of the grinding tool volume. At first, the manufacturing process is focused to create clearly divided support and abrasive layers of the grinding tool. Furthermore, the investigation shows the relationship between grinding parameters and the setback of the supporting layer in the middle of the tool. This setback is important for the creation of riblet structures in the surface of AISI 420 workpieces

Improved Microtransformer Design Utilizing Fe-Co Magnetic Core

This paper presents the design, fabrication, and characterization of on silicon integrated micro-transformers for high frequency power applications. This device has stable characteristic of L versus f up to frequencies higher as 50 MHz. The design is improved, so that the electrical resistance of coils is reduced and current capability is increased. The microtransformer shows an inductivity of about 50 nH, resistance of 350 mΩ and can be applied for current up to 1.5 A

Recent Developments of Magnetoresistive Sensors for Industrial Applications

The research and development in the field of magnetoresistive sensors has played an important role in the last few decades. Here, the authors give an introduction to the fundamentals of the anisotropic magnetoresistive (AMR) and the giant magnetoresistive (GMR) effect as well as an overview of various types of sensors in industrial applications. In addition, the authors present their recent work in this field, ranging from sensor systems fabricated on traditional substrate materials like silicon (Si), over new fabrication techniques for magnetoresistive sensors on flexible substrates for special applications, e.g., a flexible write head for component integrated data storage, micro-stamping of sensors on arbitrary surfaces or three dimensional sensing under extreme conditions (restricted mounting space in motor air gap, high temperatures during geothermal drilling).DFG/CRC/653German Federal Ministry of Education and Researc

Young’s Modulus and Residual Stresses of Oxide-Free Wire Arc Sprayed Copper Coatings

Conventional thermal spraying processes are almost exclusively carried out in an air atmosphere, resulting in the oxidation of the particle surfaces and interfaces within the coating and between the substrate and coating. Furthermore, the initial process of surface activation conventionally takes place in an air atmosphere, preventing an oxide-free interfacial transition. Consequently, the application of spraying materials with high oxygen affinity represents a major challenge. To overcome these issues, the present study utilized silane-doped inert gases to create an environment in which the oxygen concentration was equivalent to the residual oxygen content in an extreme high vacuum. By transferring the corundum blasting and coating process (wire arc spraying) to this environment, materials with a high oxygen affinity can be applied without oxidation occurring. For industrial use, this is an interesting prospect, e.g., for repair coatings, as the homogeneity of the composite is improved by a non-oxidized coating. Using the example of arc-sprayed copper coatings, the microstructure and mechanical properties of the coatings were analysed. The results showed that the oxide-free, wire arc sprayed copper coatings exhibited an improved wetting behaviour resulting in a significant reduction of the coating porosity. Moreover, the improved wetting behaviour and led to an increase in the bonding rate and apparent Young’s modulus. Contrary to expectations, the residual stresses decrease although relaxation mechanisms should be inhibited, and possible reasons for this are discussed in the paper

Characterization of the tribologically relevant cover layers formed on copper in oxygen and oxygen-free conditions

Engineering in vacuum or under a protective atmosphere permits the production of materials, wherever the absence of oxygen is an essential demand for a successful processing. However, very few studies have provided quantitative evidence of the effect of oxidized surfaces to tribological properties. In the current study on 99.99% pure copper, it is revealed that tribo-oxidation and the resulting increased abrasive wear can be suppressed by processing in an extreme high vacuum (XHV) adequate environment. The XHV adequate atmosphere was realized by using a silane-doped shielding gas (1.5 vol% SiH4 in argon). To analyse the influence of the ambient atmosphere on the tribological and mechanical properties, a ball—disk tribometer and a nanoindenter were used in air, argon, and silane-doped argon atmosphere for temperatures up to 800 °C. Resistance measurements of the resulting coatings were carried out. To characterize the microstructures and the chemical compositions of the samples, the scanning electron microscopy (SEM), energy-dispersive X-ray spectroscopy (EDS), and X-ray diffraction (XRD) were used. The investigations have revealed a formation of η-Cu3Si in silane-doped atmosphere at 300 °C, as well as various intermediate stages of copper silicides. At temperatures above 300 °C, the formation of γ-Cu5Si were detected. The formation was linked to an increase in hardness from 1.95 to 5.44 GPa, while the Young’s modulus increased by 46% to 178 GPa, with the significant reduction of the wear volume by a factor of 4.5 and the suppression of further oxidation and susceptibility of chemical wear. In addition, the relevant diffusion processes were identified using molecular dynamics (MD) simulations. [Figure not available: see fulltext.]

Direct hot embossing of microelements by means of photostructurable polyimide

While automatic hot embossing systems are available for large- and small-scale productions of polymeric devices, one of the process challenges remains to be the manufacturing of precise, durable, and yet inexpensive hot embossing stamps. The use of metallic stamps manufactured by electroplating a photoresist pattern or by precision milling and their replication into silicone molds with UV-lithography, electroplating, and molding techniques is state of the art. Yet, there have been few, if any, thriving attempts to directly emboss polymers by means of bare photoresists, and in particular polyimide-based photoresists, without transferring the photoresist patterns into a different stamp material. We conduct a proof-of-concept by developing hot embossing stamps based on photosensitive polyimide. We focus primarily on the reliability of the aforementioned stamps throughout the hot embossing cycle and the fidelity of pattern transfer onto polymeric films for different microstructural patterns. © 2016 Society of Photo-Optical Instrumentation Engineers (SPIE).DFG/CRC/Planar Optronic System